Patent Details

Patent ID: CN201010205732.6

A diamond coatings on cemented carbide preparation for diamond - silicon carbide - cobalt silicide composite interlayer method

Description: A diamond coatings on cemented carbide preparation for diamond - silicon carbide - cobalt silicide composite interlayer, which belongs to diamond coating technology.Characterized by DC plasma-assisted hot filament chemical vapor deposition (CVD) technology, hydrogen, methane and tetramethylsilane as the reaction gas, the deposition of diamond on the surface after etching to carbide cobalt processing - silicon carbide - cobalt silicide composite interlayer, and in methane and hydrogen volume ratio of 1% of the atmosphere isothermal treatment composite interlayer, and then in the middle layer of the composite deposition of diamond films. Effects and benefits of the present invention is the use of a composite intermediate layer of cobalt silicide generated significantly improved adhesion of CVD diamond coating and the cemented carbide substrate and between the CVD diamond coating toughness. Easy to control the process of the invention can be applied to CVD diamond coated carbide tools and parts, and a large area CVD diamond coatings, there are broad prospects for industrialization.

Patent Details:

DOI: C23C16 / 42 (2006.01) I; C23C16 / 32 (2006.01) I; C23C16 / 27 (2006.01) I; C23C16 / 44 (2006.01) I