Patent Details

Patent ID: CN201010227864.9

Adjustable pressure means a large-diameter flat optics for polishing

Description: An adjustable pressure means for the large-diameter polishing planar optical elements, to a pressure device. Providing a polishing surface of a workpiece for regulating the pressure suffered during processing, not only can improve the quality and control of the material removal rate of polishing the workpiece, and a simple and practical construction of the adjustable pressure device used for large diameter polished planar optical element . Has a mass and fixture plates. Mass as a pressure source; jig tablet features a strut, base and adsorption archetypes, pickets used to load mass, the lower dock connector adsorption fundamental mode, in which the adsorption of the fundamental mode has a substrate and a thin film, the base by adsorption of the fundamental mode film adsorbed on the surface, so that the entire device is fixed in the corresponding parts of the workpiece.

Patent Details:

DOI: B24B13 / 00 (2006.01) I